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Tsev > Xov xwm > Ntsiab lus
Lub hom phaj sputtering rau nyias zaj duab xis
Aug 02, 2016


Phiaj siab sputteringtshaj qhov kev lag luam ntaub ntawv tshuaj, kev cai, xws li cov me me, kawm ntawv swm, purity, lub ntsiab lus impurity, ceev, N/O/C/S, lis qhov coob thiab kev kho raws tswj; muaj ntau ntawv los yog tshwj xeeb yuav tsum: nto roughness, tus nqi ua hauj, lis loj tis, muaj pes tsawg leeg thiab microstructure, ntsiab lus txawv teb chaws lub cev (oxide) thiab me me, permeability, ultra kev kub ceev thiab lis ultra-zoo ua luaj rau. Magnetron sputtering yog ib tug tshiab lub cev roj theem deposition yog kaw lus hauv phom rau tus electron emission thiab ntawm cov khoom kom yuav sputtered tawm atoms plated ua raws tus cai hais momentum hloov kom ntau zog los ntawm cov khoom mus rau txheej tshooj deposition substrate. Qhov no yog hu ua tus sputtering phiaj clear plating.Sputtering tus hlau, alloy, boride tej hub, thiab lwm yam..

Magnetron sputtering txheejyog ib yam tshiab ntawm vapor lub cev txoj kev deposition, 2013 lubtxoj kev txheej evaporation,nws zoo muaj ntau cov kuj cuab kev. Thaum lub tshuab mature, magnetron sputtering tau siv liaj teb ntau.


Sputtering yog ib lub tshuab lub ntsiab ntawm cov nyias zaj duab xis khoom noj, nws siv generated hauv lub ion los ion, nyob rau hauv lub tshuab nqus tsev tom qab accelerating aggregation, thiab cov uas muaj kev kub ceev zog ion nqaj bombardment khoom nto, ion thiab ib khoom deg atoms niaj txauv kev tig tau, ua kom cov khoom deg atoms los tau thiab hauv cov nplaim lub substrate , tau bombarded sputtering zaj duab xis deposition ntawm lub raw khoom hu ua lub phiaj clear sputtering. Kheev muaj ntau homcov ntaub ntawv sputtered nyias zaj duab xismuaj tau lug siv semiconductor tus integrated Circuit Court xwb, sau nruab nrab, dav hlau zaub thiab deg txheej ntawm workpiece.



Hom ntaub ntawv sputtering mas yog siv hauv electronics thiab qhia kev lag luam, xws li integrated Circuit Court, ntaub ntawv cia, siv lead ua kua zaub, nco laser, qhov chaw hauv xws li; kuj yuav siv hauv lub tshav pob ntawm cov iav txheej; yuav tau siv nyob rau hauv cov ntaub ntawv coj-resistant, kub corrosion, high-grade hniav yam xws li kev lag luam.

kev faib tawm


Raws li lub hom, cov khoom yuav raug muab faib ua ib phiaj ntev, ib phiaj square, ib phiaj hloov thiab shaped ib hom qhia tshwj xeeb.


Raws li muaj pes tsawg leeg tau raug muab faib ua hlau lub hom phaj, alloy hom khoom siv, tej hub txog phiaj


Raws li nyias daim ntawv faib ua semiconductor koom haum tej hub phiaj, cov ntaubntawv povthawj siv nruab nrab tej hub phiaj, zaub tej hub phiaj, tej hub phiaj superconducting thiab giant magneto kuj tej hub khoom

Raws li tej ntaub ntawv rau tej qhov chaw yog muab faib ua microelectronics phiaj, magnetic teev cia cov khoom thiab optical disc phiaj, noble hlau hom khoom ntawd, nyias zaj duab xis resistor phiaj, conductive zaj duab xis phiaj, kev hloov kho deg phiaj thiab daim npog txheej phaj, txheej hniav hom khoom, electrode cov khoom, ntim khoom tawg yooj yim thiab lwm hom


Cov cai hais txog magnetron sputtering: sputtering lub electrode (cathode) cov anode thiab cov ntxiv ib qho magnetic orthogonal teb thiab electric teb, nyob ib siab nqus chamber lawm ua tus sau lub inert gas (feem ntau rau Ar gas), li hlau nplaum rau ntawm daim phiaj khoom tag 250 ~ 350 Gauss magnetic teb. Nrog lub siab voltage electric teb haiv orthogonal fais thiab magnetic teb. Raws li qhov txiav txim ntawm electric teb, Ar roj ionization nyob zoo ions thiab electrons, cov phiaj nrog ib tug tsis zoo siab voltage, xa mus rau ntawm cov phiaj ncej electron ionization yuav tshwm ntawm magnetic teb thiab cov ua hauj lwm roj si, ze lub cathode daim ntawv kev kub ceev ntshav, Ar ion nyob rau hauv qhov kev txiav txim ntawm cov hwjchim Lorentz accelerated rau cov phiaj nto , bombard tus hom nto nrog tus siab ceev, cov phiaj yog sputtered atoms ua raws qhov momentum conversion txojcai uas muaj kinetic zog los ntawm lub phiaj nto rau txheej tshooj substrate deposition. Magnetron sputtering yog feem ntau muab faib ua ob yam: yog ib tributary sputtering thiab RF sputtering, uas yog ib tributary ntawm cov cuab yeej siv sputtering yoojyim, nyob rau lub sputtering ntawm hlau, cov tseem ceev.

Cov xov tooj cua zaus sputtering ntau lug siv, ntxiv rau qhov ntaub conductive, nws kuj yuav siv li ib tug tsim cov khoom siv thiab cov khoom ntawm oxide, nitride thiab carbide yuav tau tsim los ntawm reactive sputtering. Yog tus RF zaus yog zoo tuaj tom qab microwave ntshav sputtering, kheev siv nyob rau hauv cov electron cyclotron resonance (ECR) hom microwave ntshav sputtering.

Magnetron phiaj sputtering:

Hlau sputtering phiaj, alloy sputtering phiaj, tej hub phiaj sputtering, boride ceramic sputtering hom khoom, carbide tej hub sputtering hom khoom, uas muaj fluoride tej hub sputtering hom khoom, nitride ceramic sputtering hom khoom, oxide tej hub phiaj, selenide tej hub sputtering hom khoom, silicide sputtering tej hub phiaj thiab sulfide ceramic sputtering hom khoom, telluride tej hub sputtering hom khoom, lwm yam phiaj tej hub, doped nrog chromium oxide silicon tej hub phiaj Cr-SiO , indium phosphide le lub hom phaj (INP), arsenic txhuas phiaj (PbAs), arsenic ntawm phiaj indium (InAs).


Purity siab thiab kev kub ceev uas muaj hom sputtering:


Sputtering phiaj (purity: 99.9% - 99.999%)


1 hlau phiaj:

Hom phiaj, phiaj, phiaj, phiaj, phiaj, phiaj, phiaj, phiaj, phiaj, phiaj, silicon, txhuas, titanium, txhuas phiaj, hom phiaj, phiaj, phiaj, phiaj, phiaj npib tsib xee phiaj, Ni, Ti phiaj, Ti, Zn, Zn, Cr, Cr, Mg, Mg NB, Nb, Sn, Sn, txhuas phiaj Al, indium, indium, luam, Fe, Zr phiaj zral phiaj, TiAl, zirconium phiaj, Zr, Al Si phiaj AlSi phiaj, Si, Cu Cu phiaj , tantalum phiaj T, ib, Ge phiaj, Ge, Ag, Ag, pa roj carbon monoxide, pa roj carbon monoxide, Au, Au, gadolinium, Gd, La, La, y, y, WIC WIC, tungsten W, stainless hlau, npib tsib xee chromium phiaj, NiCr, HF, HF, Mo, Mo, target, FeNi, tungsten phiaj, w sputtering hom khoom hlau Fe Ni.

2 tej hub phiaj

Phiaj ITO thiab cov AZO, Magnesium Oxide, phiaj, phiaj, qhov hom phiaj yog hlau oxide silicon nitride, titanium nitride, silicon carbide hom phiaj hom phiaj, Zinc Oxide chrome, zinc sulfide, silica phiaj, phiaj silicon oxide, cerium oxide phiaj, ob hom phaj thiab tsib ob zirconia oxide, titanium dioxide, niobium hom phiaj ob zirconia phiaj ob thiab phiaj oxide hafnium, phiaj ob zirconium boride titanium diboride , tungsten oxide hom phiaj, phiaj tsib peb ob txhuas oxide oxidation ntawm ob tantalum oxide tsib, niobium ob phiaj, phiaj, phiaj yttrium uas muaj fluoride, magnesium uas muaj fluoride, zinc selenide phiaj txhuas nitride phiaj, cov phiaj nitride silicon, boron nitride titanium nitride silicon carbide phiaj, phiaj, phiaj. Hom phiaj, lithium niobate titanate praseodymium barium titanate phiaj, lanthanum titanate thiab npib tsib xee oxide tej hub phiaj sputtering phiaj.

3 alloy phiaj

Ni Cr alloy phiaj, npib tsib xee vanadium alloy phiaj, txhuas silicon alloy phiaj, npib tsib xee tooj liab alloy phiaj, titanium txhuas alloy, npib tsib xee vanadium alloy phiaj thiab cov phiaj alloy ferroboron, ferrosilicon alloy hom mob npaws purity alloy sputtering phiaj.


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